7/9/2011	11:28:25 AM	Main Vac valve closed
7/9/2011	11:28:30 AM	Helium MFC set to  500.000000
7/9/2011	11:28:33 AM	Helium valve opened
7/9/2011	11:29:36 AM	Helium valve closed
7/9/2011	11:30:02 AM	Helium valve opened
7/9/2011	11:30:38 AM	Bypass valve opened
7/9/2011	11:30:39 AM	Bypass valve closed
7/9/2011	11:31:08 AM	Helium valve closed
7/9/2011	11:31:23 AM	Helium valve opened
7/9/2011	11:31:23 AM	Helium valve closed
7/9/2011	11:31:23 AM	H2 valve closed
7/9/2011	11:31:23 AM	BCl3 valve closed
7/9/2011	11:31:23 AM	PH3 valve closed
7/9/2011	11:31:23 AM	SiCl4 pre valve closed
7/9/2011	11:31:23 AM	SiCl4 post valve closed
7/9/2011	11:31:23 AM	Main Vac valve closed
7/9/2011	11:31:23 AM	Bubbler valve closed
7/9/2011	11:31:23 AM	Bypass valve closed
7/9/2011	11:31:23 AM	Helium MFC set to  0.000000
7/9/2011	11:31:23 AM	H2 MFC set to  0.000000
7/9/2011	11:31:23 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:23 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:23 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:23 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:24 AM	Tube furnace set to 0
7/9/2011	11:31:24 AM	Baratron reads 915.879913 Torr.  Emergency exit.
7/9/2011	11:31:25 AM	Program exited cleanly
7/9/2011	11:31:27 AM	Program started normally
7/9/2011	11:31:27 AM	Helium valve closed
7/9/2011	11:31:27 AM	H2 valve closed
7/9/2011	11:31:27 AM	BCl3 valve closed
7/9/2011	11:31:27 AM	PH3 valve closed
7/9/2011	11:31:27 AM	SiCl4 pre valve closed
7/9/2011	11:31:27 AM	SiCl4 post valve closed
7/9/2011	11:31:27 AM	Main Vac valve closed
7/9/2011	11:31:27 AM	Bypass valve closed
7/9/2011	11:31:27 AM	Bubbler valve closed
7/9/2011	11:31:27 AM	Helium MFC set to  0.000000
7/9/2011	11:31:27 AM	H2 MFC set to  0.000000
7/9/2011	11:31:27 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:27 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:27 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:27 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:27 AM	Tube furnace set to 0
7/9/2011	11:31:27 AM	Helium valve closed
7/9/2011	11:31:27 AM	H2 valve closed
7/9/2011	11:31:27 AM	BCl3 valve closed
7/9/2011	11:31:27 AM	PH3 valve closed
7/9/2011	11:31:27 AM	SiCl4 pre valve closed
7/9/2011	11:31:27 AM	SiCl4 post valve closed
7/9/2011	11:31:27 AM	Main Vac valve closed
7/9/2011	11:31:27 AM	Bubbler valve closed
7/9/2011	11:31:27 AM	Bypass valve closed
7/9/2011	11:31:27 AM	Helium MFC set to  0.000000
7/9/2011	11:31:27 AM	H2 MFC set to  0.000000
7/9/2011	11:31:27 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:27 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:27 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:27 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:27 AM	Tube furnace set to 0
7/9/2011	11:31:27 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:31:28 AM	Program exited cleanly
7/9/2011	11:31:30 AM	Program started normally
7/9/2011	11:31:30 AM	Helium valve closed
7/9/2011	11:31:30 AM	H2 valve closed
7/9/2011	11:31:30 AM	BCl3 valve closed
7/9/2011	11:31:30 AM	PH3 valve closed
7/9/2011	11:31:30 AM	SiCl4 pre valve closed
7/9/2011	11:31:30 AM	SiCl4 post valve closed
7/9/2011	11:31:30 AM	Main Vac valve closed
7/9/2011	11:31:30 AM	Bypass valve closed
7/9/2011	11:31:30 AM	Bubbler valve closed
7/9/2011	11:31:30 AM	Helium MFC set to  0.000000
7/9/2011	11:31:30 AM	H2 MFC set to  0.000000
7/9/2011	11:31:30 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:30 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:30 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:30 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:30 AM	Tube furnace set to 0
7/9/2011	11:31:30 AM	Helium valve closed
7/9/2011	11:31:30 AM	H2 valve closed
7/9/2011	11:31:30 AM	BCl3 valve closed
7/9/2011	11:31:30 AM	PH3 valve closed
7/9/2011	11:31:30 AM	SiCl4 pre valve closed
7/9/2011	11:31:30 AM	SiCl4 post valve closed
7/9/2011	11:31:30 AM	Main Vac valve closed
7/9/2011	11:31:30 AM	Bubbler valve closed
7/9/2011	11:31:31 AM	Bypass valve closed
7/9/2011	11:31:31 AM	Helium MFC set to  0.000000
7/9/2011	11:31:31 AM	H2 MFC set to  0.000000
7/9/2011	11:31:31 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:31 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:31 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:31 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:31 AM	Tube furnace set to 0
7/9/2011	11:31:31 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:31:32 AM	Program exited cleanly
7/9/2011	11:31:36 AM	Program started normally
7/9/2011	11:31:36 AM	Helium valve closed
7/9/2011	11:31:36 AM	H2 valve closed
7/9/2011	11:31:36 AM	BCl3 valve closed
7/9/2011	11:31:36 AM	PH3 valve closed
7/9/2011	11:31:36 AM	SiCl4 pre valve closed
7/9/2011	11:31:36 AM	SiCl4 post valve closed
7/9/2011	11:31:36 AM	Main Vac valve closed
7/9/2011	11:31:36 AM	Bypass valve closed
7/9/2011	11:31:36 AM	Bubbler valve closed
7/9/2011	11:31:36 AM	Helium MFC set to  0.000000
7/9/2011	11:31:36 AM	H2 MFC set to  0.000000
7/9/2011	11:31:36 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:36 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:36 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:36 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:36 AM	Tube furnace set to 0
7/9/2011	11:31:37 AM	Helium valve closed
7/9/2011	11:31:37 AM	H2 valve closed
7/9/2011	11:31:37 AM	BCl3 valve closed
7/9/2011	11:31:37 AM	PH3 valve closed
7/9/2011	11:31:37 AM	SiCl4 pre valve closed
7/9/2011	11:31:37 AM	SiCl4 post valve closed
7/9/2011	11:31:37 AM	Main Vac valve closed
7/9/2011	11:31:37 AM	Bubbler valve closed
7/9/2011	11:31:37 AM	Bypass valve closed
7/9/2011	11:31:37 AM	Helium MFC set to  0.000000
7/9/2011	11:31:37 AM	H2 MFC set to  0.000000
7/9/2011	11:31:37 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:37 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:37 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:37 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:37 AM	Tube furnace set to 0
7/9/2011	11:31:37 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:31:39 AM	Program exited cleanly
7/9/2011	11:31:41 AM	Program started normally
7/9/2011	11:31:41 AM	Helium valve closed
7/9/2011	11:31:41 AM	H2 valve closed
7/9/2011	11:31:41 AM	BCl3 valve closed
7/9/2011	11:31:41 AM	PH3 valve closed
7/9/2011	11:31:41 AM	SiCl4 pre valve closed
7/9/2011	11:31:41 AM	SiCl4 post valve closed
7/9/2011	11:31:41 AM	Main Vac valve closed
7/9/2011	11:31:41 AM	Bypass valve closed
7/9/2011	11:31:41 AM	Bubbler valve closed
7/9/2011	11:31:41 AM	Helium MFC set to  0.000000
7/9/2011	11:31:41 AM	H2 MFC set to  0.000000
7/9/2011	11:31:41 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:41 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:41 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:41 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:41 AM	Tube furnace set to 0
7/9/2011	11:31:41 AM	Helium valve closed
7/9/2011	11:31:41 AM	H2 valve closed
7/9/2011	11:31:41 AM	BCl3 valve closed
7/9/2011	11:31:41 AM	PH3 valve closed
7/9/2011	11:31:41 AM	SiCl4 pre valve closed
7/9/2011	11:31:41 AM	SiCl4 post valve closed
7/9/2011	11:31:41 AM	Main Vac valve closed
7/9/2011	11:31:41 AM	Bubbler valve closed
7/9/2011	11:31:41 AM	Bypass valve closed
7/9/2011	11:31:41 AM	Helium MFC set to  0.000000
7/9/2011	11:31:41 AM	H2 MFC set to  0.000000
7/9/2011	11:31:41 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:41 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:41 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:41 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:42 AM	Tube furnace set to 0
7/9/2011	11:31:42 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:31:42 AM	Program exited cleanly
7/9/2011	11:31:46 AM	Program started normally
7/9/2011	11:31:46 AM	Helium valve closed
7/9/2011	11:31:46 AM	H2 valve closed
7/9/2011	11:31:46 AM	BCl3 valve closed
7/9/2011	11:31:46 AM	PH3 valve closed
7/9/2011	11:31:46 AM	SiCl4 pre valve closed
7/9/2011	11:31:46 AM	SiCl4 post valve closed
7/9/2011	11:31:46 AM	Main Vac valve closed
7/9/2011	11:31:46 AM	Bypass valve closed
7/9/2011	11:31:46 AM	Bubbler valve closed
7/9/2011	11:31:46 AM	Helium MFC set to  0.000000
7/9/2011	11:31:46 AM	H2 MFC set to  0.000000
7/9/2011	11:31:46 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:46 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:46 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:46 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:46 AM	Tube furnace set to 0
7/9/2011	11:31:46 AM	Helium valve closed
7/9/2011	11:31:46 AM	H2 valve closed
7/9/2011	11:31:46 AM	BCl3 valve closed
7/9/2011	11:31:46 AM	PH3 valve closed
7/9/2011	11:31:46 AM	SiCl4 pre valve closed
7/9/2011	11:31:46 AM	SiCl4 post valve closed
7/9/2011	11:31:46 AM	Main Vac valve closed
7/9/2011	11:31:46 AM	Bubbler valve closed
7/9/2011	11:31:46 AM	Bypass valve closed
7/9/2011	11:31:46 AM	Helium MFC set to  0.000000
7/9/2011	11:31:46 AM	H2 MFC set to  0.000000
7/9/2011	11:31:46 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:46 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:46 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:46 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:46 AM	Tube furnace set to 0
7/9/2011	11:31:46 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:31:48 AM	Program exited cleanly
7/9/2011	11:31:49 AM	Program started normally
7/9/2011	11:31:49 AM	Helium valve closed
7/9/2011	11:31:49 AM	H2 valve closed
7/9/2011	11:31:49 AM	BCl3 valve closed
7/9/2011	11:31:49 AM	PH3 valve closed
7/9/2011	11:31:49 AM	SiCl4 pre valve closed
7/9/2011	11:31:49 AM	SiCl4 post valve closed
7/9/2011	11:31:49 AM	Main Vac valve closed
7/9/2011	11:31:49 AM	Bypass valve closed
7/9/2011	11:31:49 AM	Bubbler valve closed
7/9/2011	11:31:49 AM	Helium MFC set to  0.000000
7/9/2011	11:31:49 AM	H2 MFC set to  0.000000
7/9/2011	11:31:49 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:49 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:49 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:49 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:49 AM	Tube furnace set to 0
7/9/2011	11:31:50 AM	Helium valve closed
7/9/2011	11:31:50 AM	H2 valve closed
7/9/2011	11:31:50 AM	BCl3 valve closed
7/9/2011	11:31:50 AM	PH3 valve closed
7/9/2011	11:31:50 AM	SiCl4 pre valve closed
7/9/2011	11:31:50 AM	SiCl4 post valve closed
7/9/2011	11:31:50 AM	Main Vac valve closed
7/9/2011	11:31:50 AM	Bubbler valve closed
7/9/2011	11:31:50 AM	Bypass valve closed
7/9/2011	11:31:50 AM	Helium MFC set to  0.000000
7/9/2011	11:31:50 AM	H2 MFC set to  0.000000
7/9/2011	11:31:50 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:50 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:50 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:50 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:50 AM	Tube furnace set to 0
7/9/2011	11:31:50 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:31:51 AM	Program exited cleanly
7/9/2011	11:31:57 AM	Program started normally
7/9/2011	11:31:57 AM	Helium valve closed
7/9/2011	11:31:57 AM	H2 valve closed
7/9/2011	11:31:57 AM	BCl3 valve closed
7/9/2011	11:31:57 AM	PH3 valve closed
7/9/2011	11:31:57 AM	SiCl4 pre valve closed
7/9/2011	11:31:57 AM	SiCl4 post valve closed
7/9/2011	11:31:57 AM	Main Vac valve closed
7/9/2011	11:31:57 AM	Bypass valve closed
7/9/2011	11:31:57 AM	Bubbler valve closed
7/9/2011	11:31:57 AM	Helium MFC set to  0.000000
7/9/2011	11:31:57 AM	H2 MFC set to  0.000000
7/9/2011	11:31:57 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:57 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:57 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:57 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:57 AM	Tube furnace set to 0
7/9/2011	11:31:58 AM	Helium valve closed
7/9/2011	11:31:58 AM	H2 valve closed
7/9/2011	11:31:58 AM	BCl3 valve closed
7/9/2011	11:31:58 AM	PH3 valve closed
7/9/2011	11:31:58 AM	SiCl4 pre valve closed
7/9/2011	11:31:58 AM	SiCl4 post valve closed
7/9/2011	11:31:58 AM	Main Vac valve closed
7/9/2011	11:31:58 AM	Bubbler valve closed
7/9/2011	11:31:58 AM	Bypass valve closed
7/9/2011	11:31:58 AM	Helium MFC set to  0.000000
7/9/2011	11:31:58 AM	H2 MFC set to  0.000000
7/9/2011	11:31:58 AM	BCl3 MFC set to  0.000000
7/9/2011	11:31:58 AM	PHl3 MFC set to  0.000000
7/9/2011	11:31:58 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:31:58 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:31:58 AM	Tube furnace set to 0
7/9/2011	11:31:58 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:32:02 AM	Program exited cleanly
7/9/2011	11:32:03 AM	Program started normally
7/9/2011	11:32:03 AM	Helium valve closed
7/9/2011	11:32:03 AM	H2 valve closed
7/9/2011	11:32:03 AM	BCl3 valve closed
7/9/2011	11:32:03 AM	PH3 valve closed
7/9/2011	11:32:03 AM	SiCl4 pre valve closed
7/9/2011	11:32:03 AM	SiCl4 post valve closed
7/9/2011	11:32:03 AM	Main Vac valve closed
7/9/2011	11:32:03 AM	Bypass valve closed
7/9/2011	11:32:03 AM	Bubbler valve closed
7/9/2011	11:32:03 AM	Helium MFC set to  0.000000
7/9/2011	11:32:03 AM	H2 MFC set to  0.000000
7/9/2011	11:32:03 AM	BCl3 MFC set to  0.000000
7/9/2011	11:32:03 AM	PHl3 MFC set to  0.000000
7/9/2011	11:32:03 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:32:03 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:32:03 AM	Tube furnace set to 0
7/9/2011	11:32:04 AM	Helium valve closed
7/9/2011	11:32:04 AM	H2 valve closed
7/9/2011	11:32:04 AM	BCl3 valve closed
7/9/2011	11:32:04 AM	PH3 valve closed
7/9/2011	11:32:04 AM	SiCl4 pre valve closed
7/9/2011	11:32:04 AM	SiCl4 post valve closed
7/9/2011	11:32:04 AM	Main Vac valve closed
7/9/2011	11:32:04 AM	Bubbler valve closed
7/9/2011	11:32:04 AM	Bypass valve closed
7/9/2011	11:32:04 AM	Helium MFC set to  0.000000
7/9/2011	11:32:04 AM	H2 MFC set to  0.000000
7/9/2011	11:32:04 AM	BCl3 MFC set to  0.000000
7/9/2011	11:32:04 AM	PHl3 MFC set to  0.000000
7/9/2011	11:32:04 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:32:04 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:32:04 AM	Tube furnace set to 0
7/9/2011	11:32:04 AM	Baratron reads 935.275645 Torr.  Emergency exit.
7/9/2011	11:32:05 AM	Program exited cleanly
7/9/2011	11:32:14 AM	Program started normally
7/9/2011	11:32:14 AM	Helium valve closed
7/9/2011	11:32:14 AM	H2 valve closed
7/9/2011	11:32:14 AM	BCl3 valve closed
7/9/2011	11:32:14 AM	PH3 valve closed
7/9/2011	11:32:14 AM	SiCl4 pre valve closed
7/9/2011	11:32:14 AM	SiCl4 post valve closed
7/9/2011	11:32:14 AM	Main Vac valve closed
7/9/2011	11:32:14 AM	Bypass valve closed
7/9/2011	11:32:14 AM	Bubbler valve closed
7/9/2011	11:32:14 AM	Helium MFC set to  0.000000
7/9/2011	11:32:14 AM	H2 MFC set to  0.000000
7/9/2011	11:32:14 AM	BCl3 MFC set to  0.000000
7/9/2011	11:32:14 AM	PHl3 MFC set to  0.000000
7/9/2011	11:32:14 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:32:14 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:32:14 AM	Tube furnace set to 0
7/9/2011	11:32:16 AM	Bypass valve opened
7/9/2011	11:32:17 AM	Bypass valve closed
7/9/2011	11:32:32 AM	Program started after a nonstandard shutdown
7/9/2011	11:32:32 AM	Helium valve closed
7/9/2011	11:32:32 AM	H2 valve closed
7/9/2011	11:32:32 AM	BCl3 valve closed
7/9/2011	11:32:32 AM	PH3 valve closed
7/9/2011	11:32:32 AM	SiCl4 pre valve closed
7/9/2011	11:32:32 AM	SiCl4 post valve closed
7/9/2011	11:32:32 AM	Main Vac valve closed
7/9/2011	11:32:32 AM	Bypass valve closed
7/9/2011	11:32:32 AM	Bubbler valve closed
7/9/2011	11:32:32 AM	Helium MFC set to  0.000000
7/9/2011	11:32:32 AM	H2 MFC set to  0.000000
7/9/2011	11:32:32 AM	BCl3 MFC set to  0.000000
7/9/2011	11:32:32 AM	PHl3 MFC set to  0.000000
7/9/2011	11:32:32 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:32:32 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:32:32 AM	Tube furnace set to 0
7/9/2011	11:32:41 AM	SiCl4 post valve opened
7/9/2011	11:32:42 AM	Bypass valve opened
7/9/2011	11:32:43 AM	Bypass valve closed
7/9/2011	11:32:49 AM	Helium MFC set to  100.000000
7/9/2011	11:32:50 AM	Helium valve opened
7/9/2011	11:33:01 AM	Helium valve closed
7/9/2011	11:33:04 AM	Helium MFC set to  500.000000
7/9/2011	11:33:06 AM	Helium valve opened
7/9/2011	11:33:31 AM	Helium valve closed
7/9/2011	11:33:34 AM	Helium valve opened
7/9/2011	11:33:36 AM	Helium valve closed
7/9/2011	11:33:37 AM	Helium valve opened
7/9/2011	11:33:46 AM	Bypass valve opened
7/9/2011	11:33:47 AM	Bypass valve closed
7/9/2011	11:33:52 AM	Helium valve closed
7/9/2011	11:34:08 AM	Helium valve opened
7/9/2011	11:34:08 AM	Helium valve closed
7/9/2011	11:34:11 AM	Bypass valve opened
7/9/2011	11:34:12 AM	Bypass valve closed
7/9/2011	11:34:14 AM	Helium valve opened
7/9/2011	11:34:15 AM	Helium valve closed
7/9/2011	11:34:16 AM	Helium valve opened
7/9/2011	11:34:18 AM	Helium valve closed
7/9/2011	11:34:47 AM	SiCl4 MFC set to  100.000000
7/9/2011	11:34:49 AM	SiCl4 pre valve opened
7/9/2011	11:35:00 AM	Helium valve opened
7/9/2011	11:35:02 AM	Bypass valve opened
7/9/2011	11:35:02 AM	Bypass valve closed
7/9/2011	11:35:08 AM	Bypass valve opened
7/9/2011	11:35:08 AM	Bypass valve closed
7/9/2011	11:35:14 AM	Bypass valve opened
7/9/2011	11:35:15 AM	Bypass valve closed
7/9/2011	11:35:23 AM	Bypass valve opened
7/9/2011	11:35:23 AM	Bypass valve closed
7/9/2011	11:35:25 AM	Bypass valve opened
7/9/2011	11:35:25 AM	Bypass valve closed
7/9/2011	11:35:26 AM	Bypass valve opened
7/9/2011	11:35:26 AM	Bypass valve closed
7/9/2011	11:35:26 AM	Bypass valve opened
7/9/2011	11:35:31 AM	Bypass valve closed
7/9/2011	11:35:42 AM	Helium valve closed
7/9/2011	11:35:42 AM	SiCl4 pre valve closed
7/9/2011	11:35:43 AM	SiCl4 post valve closed
7/9/2011	11:35:57 AM	SiCl4 pre valve opened
7/9/2011	11:35:58 AM	SiCl4 pre valve closed
7/9/2011	11:35:58 AM	SiCl4 post valve opened
7/9/2011	11:36:01 AM	SiCl4 pre valve opened
7/9/2011	11:36:07 AM	Helium valve opened
7/9/2011	11:36:34 AM	Bypass valve opened
7/9/2011	11:36:34 AM	Bypass valve closed
7/9/2011	11:36:42 AM	Bypass valve opened
7/9/2011	11:36:42 AM	Bypass valve closed
7/9/2011	11:36:43 AM	Bypass valve opened
7/9/2011	11:36:43 AM	Bypass valve closed
7/9/2011	11:36:49 AM	Bypass valve opened
7/9/2011	11:36:49 AM	Bypass valve closed
7/9/2011	11:37:01 AM	Helium valve closed
7/9/2011	11:37:01 AM	SiCl4 pre valve closed
7/9/2011	11:37:02 AM	SiCl4 post valve closed
7/9/2011	11:37:13 AM	SiCl4 post valve opened
7/9/2011	11:37:15 AM	SiCl4 pre valve opened
7/9/2011	11:37:17 AM	Helium valve opened
7/9/2011	11:37:18 AM	Helium valve closed
7/9/2011	11:37:18 AM	H2 valve closed
7/9/2011	11:37:18 AM	BCl3 valve closed
7/9/2011	11:37:18 AM	PH3 valve closed
7/9/2011	11:37:18 AM	SiCl4 pre valve closed
7/9/2011	11:37:18 AM	SiCl4 post valve closed
7/9/2011	11:37:18 AM	Main Vac valve closed
7/9/2011	11:37:18 AM	Bubbler valve closed
7/9/2011	11:37:18 AM	Bypass valve closed
7/9/2011	11:37:18 AM	Helium MFC set to  0.000000
7/9/2011	11:37:18 AM	H2 MFC set to  0.000000
7/9/2011	11:37:18 AM	BCl3 MFC set to  0.000000
7/9/2011	11:37:18 AM	PHl3 MFC set to  0.000000
7/9/2011	11:37:18 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:37:18 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:37:18 AM	Tube furnace set to 0
7/9/2011	11:37:18 AM	Baratron reads 978.150422 Torr.  Emergency exit.
7/9/2011	11:37:19 AM	Program exited cleanly
7/9/2011	11:37:29 AM	Program started normally
7/9/2011	11:37:29 AM	Helium valve closed
7/9/2011	11:37:29 AM	H2 valve closed
7/9/2011	11:37:29 AM	BCl3 valve closed
7/9/2011	11:37:29 AM	PH3 valve closed
7/9/2011	11:37:29 AM	SiCl4 pre valve closed
7/9/2011	11:37:29 AM	SiCl4 post valve closed
7/9/2011	11:37:29 AM	Main Vac valve closed
7/9/2011	11:37:29 AM	Bypass valve closed
7/9/2011	11:37:29 AM	Bubbler valve closed
7/9/2011	11:37:29 AM	Helium MFC set to  0.000000
7/9/2011	11:37:29 AM	H2 MFC set to  0.000000
7/9/2011	11:37:29 AM	BCl3 MFC set to  0.000000
7/9/2011	11:37:29 AM	PHl3 MFC set to  0.000000
7/9/2011	11:37:29 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:37:29 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:37:29 AM	Tube furnace set to 0
7/9/2011	11:37:31 AM	Bypass valve opened
7/9/2011	11:37:32 AM	Bypass valve closed
7/9/2011	11:37:45 AM	Program started after a nonstandard shutdown
7/9/2011	11:37:45 AM	Helium valve closed
7/9/2011	11:37:45 AM	H2 valve closed
7/9/2011	11:37:45 AM	BCl3 valve closed
7/9/2011	11:37:45 AM	PH3 valve closed
7/9/2011	11:37:45 AM	SiCl4 pre valve closed
7/9/2011	11:37:45 AM	SiCl4 post valve closed
7/9/2011	11:37:45 AM	Main Vac valve closed
7/9/2011	11:37:45 AM	Bypass valve closed
7/9/2011	11:37:45 AM	Bubbler valve closed
7/9/2011	11:37:45 AM	Helium MFC set to  0.000000
7/9/2011	11:37:45 AM	H2 MFC set to  0.000000
7/9/2011	11:37:45 AM	BCl3 MFC set to  0.000000
7/9/2011	11:37:45 AM	PHl3 MFC set to  0.000000
7/9/2011	11:37:45 AM	SiCl4 MFC set to  0.000000
7/9/2011	11:37:45 AM	Bypass solenoid MFC set to  760.000000
7/9/2011	11:37:45 AM	Tube furnace set to 0
7/9/2011	11:37:51 AM	SiCl4 MFC set to  100.000000
7/9/2011	11:37:54 AM	SiCl4 post valve opened
7/9/2011	11:37:56 AM	SiCl4 pre valve opened
7/9/2011	11:38:03 AM	Bypass valve opened
7/9/2011	11:38:04 AM	Bypass valve closed
7/9/2011	11:38:09 AM	Helium MFC set to  100.000000
7/9/2011	11:38:11 AM	Helium valve opened
7/9/2011	11:38:46 AM	Helium valve closed
7/9/2011	11:38:47 AM	SiCl4 pre valve closed
7/9/2011	11:38:47 AM	SiCl4 pre valve opened
7/9/2011	11:38:47 AM	SiCl4 pre valve closed
7/9/2011	11:38:58 AM	SiCl4 post valve closed
7/9/2011	11:41:10 AM	SiCl4 post valve opened
7/9/2011	11:41:10 AM	SiCl4 post valve closed
7/9/2011	11:41:18 AM	SiCl4 post valve opened
7/9/2011	11:41:20 AM	SiCl4 post valve closed
7/9/2011	11:41:44 AM	Bypass valve opened
7/9/2011	11:43:03 AM	Bypass valve closed
7/9/2011	11:43:03 AM	Main Vac valve opened
7/9/2011	11:47:51 AM	Main Vac valve closed
7/9/2011	11:50:18 AM	Bypass valve opened
7/9/2011	11:51:58 AM	Bypass valve closed
7/9/2011	11:51:59 AM	Main Vac valve opened
7/9/2011	12:30:36 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:30:39 PM	Helium MFC set to  0.000000
7/9/2011	12:30:49 PM	Recipe started at 12:30 PM
7/9/2011	12:30:49 PM	Helium valve closed
7/9/2011	12:30:49 PM	H2 valve closed
7/9/2011	12:30:49 PM	BCl3 valve closed
7/9/2011	12:30:49 PM	PH3 valve closed
7/9/2011	12:30:49 PM	SiCl4 pre valve closed
7/9/2011	12:30:49 PM	SiCl4 post valve closed
7/9/2011	12:30:49 PM	Main Vac valve closed
7/9/2011	12:30:49 PM	Bypass valve closed
7/9/2011	12:30:49 PM	Bubbler valve closed
7/9/2011	12:30:49 PM	Helium MFC set to  0.000000
7/9/2011	12:30:49 PM	H2 MFC set to  0.000000
7/9/2011	12:30:49 PM	BCl3 MFC set to  0.000000
7/9/2011	12:30:49 PM	PHl3 MFC set to  0.000000
7/9/2011	12:30:49 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:30:49 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:30:50 PM	Tube furnace set to 0
7/9/2011	12:30:53 PM	Helium valve closed
7/9/2011	12:30:53 PM	BCl3 valve closed
7/9/2011	12:30:53 PM	PH3 valve closed
7/9/2011	12:30:53 PM	SiCl4 pre valve closed
7/9/2011	12:30:53 PM	SiCl4 post valve closed
7/9/2011	12:30:53 PM	Main Vac valve closed
7/9/2011	12:30:53 PM	Bypass valve closed
7/9/2011	12:30:53 PM	Bubbler valve closed
7/9/2011	12:30:53 PM	H2 valve opened
7/9/2011	12:30:53 PM	Helium MFC set to  0.000000
7/9/2011	12:30:53 PM	H2 MFC set to  500.000000
7/9/2011	12:30:53 PM	BCl3 MFC set to  0.000000
7/9/2011	12:30:53 PM	PHl3 MFC set to  0.000000
7/9/2011	12:30:53 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:30:53 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:30:53 PM	Tube furnace set to 0
7/9/2011	12:31:59 PM	Helium valve closed
7/9/2011	12:31:59 PM	BCl3 valve closed
7/9/2011	12:31:59 PM	PH3 valve closed
7/9/2011	12:31:59 PM	SiCl4 pre valve closed
7/9/2011	12:31:59 PM	SiCl4 post valve closed
7/9/2011	12:31:59 PM	Main Vac valve closed
7/9/2011	12:31:59 PM	Bypass valve closed
7/9/2011	12:31:59 PM	H2 valve opened
7/9/2011	12:31:59 PM	Bubbler valve opened
7/9/2011	12:31:59 PM	Helium MFC set to  0.000000
7/9/2011	12:31:59 PM	H2 MFC set to  500.000000
7/9/2011	12:31:59 PM	BCl3 MFC set to  0.000000
7/9/2011	12:31:59 PM	PHl3 MFC set to  0.000000
7/9/2011	12:31:59 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:31:59 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:31:59 PM	Tube furnace set to 0
7/9/2011	12:32:00 PM	Helium valve closed
7/9/2011	12:32:00 PM	BCl3 valve closed
7/9/2011	12:32:00 PM	PH3 valve closed
7/9/2011	12:32:00 PM	SiCl4 pre valve closed
7/9/2011	12:32:00 PM	SiCl4 post valve closed
7/9/2011	12:32:00 PM	Main Vac valve closed
7/9/2011	12:32:00 PM	Bypass valve closed
7/9/2011	12:32:00 PM	Bubbler valve closed
7/9/2011	12:32:00 PM	H2 valve opened
7/9/2011	12:32:00 PM	Helium MFC set to  0.000000
7/9/2011	12:32:00 PM	H2 MFC set to  500.000000
7/9/2011	12:32:00 PM	BCl3 MFC set to  0.000000
7/9/2011	12:32:00 PM	PHl3 MFC set to  0.000000
7/9/2011	12:32:00 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:32:00 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:32:01 PM	Tube furnace set to 1000
7/9/2011	12:32:08 PM	Run aborted at 12:32 PM
7/9/2011	12:32:08 PM	Helium valve closed
7/9/2011	12:32:08 PM	H2 valve closed
7/9/2011	12:32:08 PM	BCl3 valve closed
7/9/2011	12:32:08 PM	PH3 valve closed
7/9/2011	12:32:08 PM	SiCl4 pre valve closed
7/9/2011	12:32:08 PM	SiCl4 post valve closed
7/9/2011	12:32:08 PM	Bypass valve closed
7/9/2011	12:32:08 PM	Main Vac valve closed
7/9/2011	12:32:08 PM	Bubbler valve closed
7/9/2011	12:32:08 PM	Helium MFC set to  0.000000
7/9/2011	12:32:08 PM	H2 MFC set to  0.000000
7/9/2011	12:32:08 PM	BCl3 MFC set to  0.000000
7/9/2011	12:32:08 PM	PHl3 MFC set to  0.000000
7/9/2011	12:32:08 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:32:08 PM	Tube furnace set to 0
7/9/2011	12:32:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2011	12:32:23 PM	Recipe started at 12:32 PM
7/9/2011	12:32:23 PM	Helium valve closed
7/9/2011	12:32:23 PM	H2 valve closed
7/9/2011	12:32:23 PM	BCl3 valve closed
7/9/2011	12:32:23 PM	PH3 valve closed
7/9/2011	12:32:23 PM	SiCl4 pre valve closed
7/9/2011	12:32:23 PM	SiCl4 post valve closed
7/9/2011	12:32:23 PM	Main Vac valve closed
7/9/2011	12:32:23 PM	Bubbler valve closed
7/9/2011	12:32:23 PM	Bypass valve opened
7/9/2011	12:32:23 PM	Helium MFC set to  0.000000
7/9/2011	12:32:23 PM	H2 MFC set to  0.000000
7/9/2011	12:32:23 PM	BCl3 MFC set to  0.000000
7/9/2011	12:32:23 PM	PHl3 MFC set to  0.000000
7/9/2011	12:32:23 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:32:23 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:32:24 PM	Tube furnace set to 0
7/9/2011	12:32:58 PM	Helium valve closed
7/9/2011	12:32:58 PM	H2 valve closed
7/9/2011	12:32:58 PM	BCl3 valve closed
7/9/2011	12:32:58 PM	PH3 valve closed
7/9/2011	12:32:58 PM	SiCl4 pre valve closed
7/9/2011	12:32:58 PM	SiCl4 post valve closed
7/9/2011	12:32:58 PM	Main Vac valve closed
7/9/2011	12:32:58 PM	Bubbler valve closed
7/9/2011	12:32:58 PM	Bypass valve opened
7/9/2011	12:32:58 PM	Helium MFC set to  0.000000
7/9/2011	12:32:58 PM	H2 MFC set to  0.000000
7/9/2011	12:32:58 PM	BCl3 MFC set to  0.000000
7/9/2011	12:32:58 PM	PHl3 MFC set to  0.000000
7/9/2011	12:32:58 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:32:58 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:32:58 PM	Tube furnace set to 0
7/9/2011	12:33:02 PM	Helium valve closed
7/9/2011	12:33:02 PM	H2 valve closed
7/9/2011	12:33:02 PM	BCl3 valve closed
7/9/2011	12:33:02 PM	PH3 valve closed
7/9/2011	12:33:02 PM	SiCl4 pre valve closed
7/9/2011	12:33:02 PM	SiCl4 post valve closed
7/9/2011	12:33:02 PM	Bypass valve closed
7/9/2011	12:33:02 PM	Bubbler valve closed
7/9/2011	12:33:02 PM	Main Vac valve opened
7/9/2011	12:33:02 PM	Helium MFC set to  0.000000
7/9/2011	12:33:02 PM	H2 MFC set to  0.000000
7/9/2011	12:33:02 PM	BCl3 MFC set to  0.000000
7/9/2011	12:33:02 PM	PHl3 MFC set to  0.000000
7/9/2011	12:33:02 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:33:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:33:02 PM	Tube furnace set to 0
7/9/2011	12:33:03 PM	Run finished at 12:33 PM
7/9/2011	12:33:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2011	12:34:09 PM	Recipe started at 12:34 PM
7/9/2011	12:34:09 PM	Helium valve closed
7/9/2011	12:34:09 PM	H2 valve closed
7/9/2011	12:34:09 PM	BCl3 valve closed
7/9/2011	12:34:09 PM	PH3 valve closed
7/9/2011	12:34:09 PM	SiCl4 pre valve closed
7/9/2011	12:34:09 PM	SiCl4 post valve closed
7/9/2011	12:34:09 PM	Main Vac valve closed
7/9/2011	12:34:09 PM	Bypass valve closed
7/9/2011	12:34:09 PM	Bubbler valve closed
7/9/2011	12:34:09 PM	Helium MFC set to  0.000000
7/9/2011	12:34:09 PM	H2 MFC set to  0.000000
7/9/2011	12:34:09 PM	BCl3 MFC set to  0.000000
7/9/2011	12:34:09 PM	PHl3 MFC set to  0.000000
7/9/2011	12:34:09 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:34:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:34:09 PM	Tube furnace set to 0
7/9/2011	12:34:12 PM	Helium valve closed
7/9/2011	12:34:12 PM	BCl3 valve closed
7/9/2011	12:34:12 PM	PH3 valve closed
7/9/2011	12:34:12 PM	SiCl4 pre valve closed
7/9/2011	12:34:12 PM	SiCl4 post valve closed
7/9/2011	12:34:12 PM	Main Vac valve closed
7/9/2011	12:34:13 PM	Bypass valve closed
7/9/2011	12:34:13 PM	Bubbler valve closed
7/9/2011	12:34:13 PM	H2 valve opened
7/9/2011	12:34:13 PM	Helium MFC set to  0.000000
7/9/2011	12:34:13 PM	H2 MFC set to  500.000000
7/9/2011	12:34:13 PM	BCl3 MFC set to  0.000000
7/9/2011	12:34:13 PM	PHl3 MFC set to  0.000000
7/9/2011	12:34:13 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:34:13 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:34:13 PM	Tube furnace set to 0
7/9/2011	12:35:20 PM	Helium valve closed
7/9/2011	12:35:20 PM	BCl3 valve closed
7/9/2011	12:35:20 PM	PH3 valve closed
7/9/2011	12:35:20 PM	SiCl4 pre valve closed
7/9/2011	12:35:20 PM	SiCl4 post valve closed
7/9/2011	12:35:20 PM	Main Vac valve closed
7/9/2011	12:35:20 PM	Bypass valve closed
7/9/2011	12:35:20 PM	H2 valve opened
7/9/2011	12:35:20 PM	Bubbler valve opened
7/9/2011	12:35:20 PM	Helium MFC set to  0.000000
7/9/2011	12:35:20 PM	H2 MFC set to  500.000000
7/9/2011	12:35:20 PM	BCl3 MFC set to  0.000000
7/9/2011	12:35:20 PM	PHl3 MFC set to  0.000000
7/9/2011	12:35:20 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:35:20 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:35:20 PM	Tube furnace set to 0
7/9/2011	12:35:21 PM	Helium valve closed
7/9/2011	12:35:21 PM	BCl3 valve closed
7/9/2011	12:35:21 PM	PH3 valve closed
7/9/2011	12:35:21 PM	SiCl4 pre valve closed
7/9/2011	12:35:21 PM	SiCl4 post valve closed
7/9/2011	12:35:21 PM	Main Vac valve closed
7/9/2011	12:35:21 PM	Bypass valve closed
7/9/2011	12:35:21 PM	H2 valve opened
7/9/2011	12:35:21 PM	Bubbler valve opened
7/9/2011	12:35:21 PM	Helium MFC set to  0.000000
7/9/2011	12:35:21 PM	H2 MFC set to  500.000000
7/9/2011	12:35:21 PM	BCl3 MFC set to  0.000000
7/9/2011	12:35:21 PM	PHl3 MFC set to  0.000000
7/9/2011	12:35:21 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:35:21 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:35:21 PM	Tube furnace set to 1000
7/9/2011	12:35:43 PM	Run aborted at 12:35 PM
7/9/2011	12:35:43 PM	Helium valve closed
7/9/2011	12:35:43 PM	H2 valve closed
7/9/2011	12:35:43 PM	BCl3 valve closed
7/9/2011	12:35:43 PM	PH3 valve closed
7/9/2011	12:35:43 PM	SiCl4 pre valve closed
7/9/2011	12:35:43 PM	SiCl4 post valve closed
7/9/2011	12:35:43 PM	Bypass valve closed
7/9/2011	12:35:43 PM	Main Vac valve closed
7/9/2011	12:35:43 PM	Bubbler valve closed
7/9/2011	12:35:43 PM	Helium MFC set to  0.000000
7/9/2011	12:35:43 PM	H2 MFC set to  0.000000
7/9/2011	12:35:43 PM	BCl3 MFC set to  0.000000
7/9/2011	12:35:43 PM	PHl3 MFC set to  0.000000
7/9/2011	12:35:43 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:35:43 PM	Tube furnace set to 0
7/9/2011	12:35:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2011	12:35:50 PM	Recipe started at 12:35 PM
7/9/2011	12:35:50 PM	Helium valve closed
7/9/2011	12:35:50 PM	H2 valve closed
7/9/2011	12:35:50 PM	BCl3 valve closed
7/9/2011	12:35:50 PM	PH3 valve closed
7/9/2011	12:35:50 PM	SiCl4 pre valve closed
7/9/2011	12:35:50 PM	SiCl4 post valve closed
7/9/2011	12:35:50 PM	Main Vac valve closed
7/9/2011	12:35:50 PM	Bubbler valve closed
7/9/2011	12:35:50 PM	Bypass valve opened
7/9/2011	12:35:50 PM	Helium MFC set to  0.000000
7/9/2011	12:35:50 PM	H2 MFC set to  0.000000
7/9/2011	12:35:50 PM	BCl3 MFC set to  0.000000
7/9/2011	12:35:50 PM	PHl3 MFC set to  0.000000
7/9/2011	12:35:50 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:35:50 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:35:50 PM	Tube furnace set to 0
7/9/2011	12:36:24 PM	Helium valve closed
7/9/2011	12:36:24 PM	H2 valve closed
7/9/2011	12:36:24 PM	BCl3 valve closed
7/9/2011	12:36:24 PM	PH3 valve closed
7/9/2011	12:36:24 PM	SiCl4 pre valve closed
7/9/2011	12:36:24 PM	SiCl4 post valve closed
7/9/2011	12:36:24 PM	Main Vac valve closed
7/9/2011	12:36:24 PM	Bubbler valve closed
7/9/2011	12:36:24 PM	Bypass valve opened
7/9/2011	12:36:24 PM	Helium MFC set to  0.000000
7/9/2011	12:36:24 PM	H2 MFC set to  0.000000
7/9/2011	12:36:24 PM	BCl3 MFC set to  0.000000
7/9/2011	12:36:24 PM	PHl3 MFC set to  0.000000
7/9/2011	12:36:24 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:36:24 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:36:24 PM	Tube furnace set to 0
7/9/2011	12:36:35 PM	Helium valve closed
7/9/2011	12:36:35 PM	H2 valve closed
7/9/2011	12:36:35 PM	BCl3 valve closed
7/9/2011	12:36:35 PM	PH3 valve closed
7/9/2011	12:36:35 PM	SiCl4 pre valve closed
7/9/2011	12:36:35 PM	SiCl4 post valve closed
7/9/2011	12:36:35 PM	Bypass valve closed
7/9/2011	12:36:35 PM	Bubbler valve closed
7/9/2011	12:36:35 PM	Main Vac valve opened
7/9/2011	12:36:35 PM	Helium MFC set to  0.000000
7/9/2011	12:36:35 PM	H2 MFC set to  0.000000
7/9/2011	12:36:35 PM	BCl3 MFC set to  0.000000
7/9/2011	12:36:36 PM	PHl3 MFC set to  0.000000
7/9/2011	12:36:36 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:36:36 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:36:36 PM	Tube furnace set to 0
7/9/2011	12:36:37 PM	Run finished at 12:36 PM
7/9/2011	12:36:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2011	12:42:41 PM	Recipe started at 12:42 PM
7/9/2011	12:42:41 PM	Helium valve closed
7/9/2011	12:42:41 PM	H2 valve closed
7/9/2011	12:42:41 PM	BCl3 valve closed
7/9/2011	12:42:41 PM	PH3 valve closed
7/9/2011	12:42:41 PM	SiCl4 pre valve closed
7/9/2011	12:42:41 PM	SiCl4 post valve closed
7/9/2011	12:42:41 PM	Main Vac valve closed
7/9/2011	12:42:41 PM	Bypass valve closed
7/9/2011	12:42:41 PM	Bubbler valve closed
7/9/2011	12:42:41 PM	Helium MFC set to  0.000000
7/9/2011	12:42:41 PM	H2 MFC set to  0.000000
7/9/2011	12:42:41 PM	BCl3 MFC set to  0.000000
7/9/2011	12:42:41 PM	PHl3 MFC set to  0.000000
7/9/2011	12:42:41 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:42:41 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:42:41 PM	Tube furnace set to 0
7/9/2011	12:42:44 PM	Helium valve closed
7/9/2011	12:42:44 PM	BCl3 valve closed
7/9/2011	12:42:44 PM	PH3 valve closed
7/9/2011	12:42:44 PM	SiCl4 pre valve closed
7/9/2011	12:42:44 PM	SiCl4 post valve closed
7/9/2011	12:42:44 PM	Main Vac valve closed
7/9/2011	12:42:44 PM	Bypass valve closed
7/9/2011	12:42:44 PM	Bubbler valve closed
7/9/2011	12:42:44 PM	H2 valve opened
7/9/2011	12:42:44 PM	Helium MFC set to  0.000000
7/9/2011	12:42:44 PM	H2 MFC set to  500.000000
7/9/2011	12:42:44 PM	BCl3 MFC set to  0.000000
7/9/2011	12:42:44 PM	PHl3 MFC set to  0.000000
7/9/2011	12:42:44 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:42:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:42:45 PM	Tube furnace set to 0
7/9/2011	12:43:50 PM	Helium valve closed
7/9/2011	12:43:50 PM	BCl3 valve closed
7/9/2011	12:43:50 PM	PH3 valve closed
7/9/2011	12:43:50 PM	SiCl4 pre valve closed
7/9/2011	12:43:50 PM	SiCl4 post valve closed
7/9/2011	12:43:50 PM	Main Vac valve closed
7/9/2011	12:43:50 PM	Bypass valve closed
7/9/2011	12:43:50 PM	H2 valve opened
7/9/2011	12:43:50 PM	Bubbler valve opened
7/9/2011	12:43:50 PM	Helium MFC set to  0.000000
7/9/2011	12:43:50 PM	H2 MFC set to  500.000000
7/9/2011	12:43:50 PM	BCl3 MFC set to  0.000000
7/9/2011	12:43:50 PM	PHl3 MFC set to  0.000000
7/9/2011	12:43:50 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:43:50 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:43:50 PM	Tube furnace set to 0
7/9/2011	12:43:51 PM	Helium valve closed
7/9/2011	12:43:51 PM	BCl3 valve closed
7/9/2011	12:43:51 PM	PH3 valve closed
7/9/2011	12:43:51 PM	SiCl4 pre valve closed
7/9/2011	12:43:51 PM	SiCl4 post valve closed
7/9/2011	12:43:51 PM	Main Vac valve closed
7/9/2011	12:43:51 PM	Bypass valve closed
7/9/2011	12:43:51 PM	H2 valve opened
7/9/2011	12:43:51 PM	Bubbler valve opened
7/9/2011	12:43:51 PM	Helium MFC set to  0.000000
7/9/2011	12:43:51 PM	H2 MFC set to  500.000000
7/9/2011	12:43:51 PM	BCl3 MFC set to  0.000000
7/9/2011	12:43:51 PM	PHl3 MFC set to  0.000000
7/9/2011	12:43:51 PM	SiCl4 MFC set to  0.000000
7/9/2011	12:43:51 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	12:43:51 PM	Tube furnace set to 1000
7/9/2011	1:03:51 PM	Helium valve closed
7/9/2011	1:03:51 PM	BCl3 valve closed
7/9/2011	1:03:51 PM	PH3 valve closed
7/9/2011	1:03:51 PM	Main Vac valve closed
7/9/2011	1:03:51 PM	Bypass valve closed
7/9/2011	1:03:51 PM	H2 valve opened
7/9/2011	1:03:51 PM	SiCl4 pre valve opened
7/9/2011	1:03:51 PM	SiCl4 post valve opened
7/9/2011	1:03:51 PM	Bubbler valve opened
7/9/2011	1:03:51 PM	Helium MFC set to  0.000000
7/9/2011	1:03:51 PM	H2 MFC set to  500.000000
7/9/2011	1:03:51 PM	BCl3 MFC set to  0.000000
7/9/2011	1:03:51 PM	PHl3 MFC set to  0.000000
7/9/2011	1:03:51 PM	SiCl4 MFC set to  50.000000
7/9/2011	1:03:51 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	1:03:52 PM	Tube furnace set to 1000
7/9/2011	1:23:52 PM	Helium valve closed
7/9/2011	1:23:52 PM	BCl3 valve closed
7/9/2011	1:23:52 PM	PH3 valve closed
7/9/2011	1:23:52 PM	SiCl4 pre valve closed
7/9/2011	1:23:52 PM	SiCl4 post valve closed
7/9/2011	1:23:52 PM	Main Vac valve closed
7/9/2011	1:23:52 PM	Bypass valve closed
7/9/2011	1:23:52 PM	H2 valve opened
7/9/2011	1:23:52 PM	Bubbler valve opened
7/9/2011	1:23:52 PM	Helium MFC set to  0.000000
7/9/2011	1:23:52 PM	H2 MFC set to  500.000000
7/9/2011	1:23:52 PM	BCl3 MFC set to  0.000000
7/9/2011	1:23:52 PM	PHl3 MFC set to  0.000000
7/9/2011	1:23:52 PM	SiCl4 MFC set to  0.000000
7/9/2011	1:23:52 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	1:23:52 PM	Tube furnace set to 750
7/9/2011	1:26:55 PM	H2 valve closed
7/9/2011	1:26:55 PM	BCl3 valve closed
7/9/2011	1:26:55 PM	PH3 valve closed
7/9/2011	1:26:55 PM	SiCl4 pre valve closed
7/9/2011	1:26:55 PM	SiCl4 post valve closed
7/9/2011	1:26:55 PM	Main Vac valve closed
7/9/2011	1:26:55 PM	Bypass valve closed
7/9/2011	1:26:55 PM	Helium valve opened
7/9/2011	1:26:55 PM	Bubbler valve opened
7/9/2011	1:26:55 PM	Helium MFC set to  500.000000
7/9/2011	1:26:55 PM	H2 MFC set to  0.000000
7/9/2011	1:26:55 PM	BCl3 MFC set to  0.000000
7/9/2011	1:26:55 PM	PHl3 MFC set to  0.000000
7/9/2011	1:26:55 PM	SiCl4 MFC set to  0.000000
7/9/2011	1:26:55 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	1:26:55 PM	Tube furnace set to 0
7/9/2011	1:43:12 PM	Helium valve closed
7/9/2011	1:43:12 PM	H2 valve closed
7/9/2011	1:43:12 PM	BCl3 valve closed
7/9/2011	1:43:12 PM	PH3 valve closed
7/9/2011	1:43:12 PM	SiCl4 pre valve closed
7/9/2011	1:43:12 PM	SiCl4 post valve closed
7/9/2011	1:43:12 PM	Main Vac valve closed
7/9/2011	1:43:12 PM	Bypass valve closed
7/9/2011	1:43:12 PM	Bubbler valve closed
7/9/2011	1:43:12 PM	Helium MFC set to  0.000000
7/9/2011	1:43:12 PM	H2 MFC set to  0.000000
7/9/2011	1:43:12 PM	BCl3 MFC set to  0.000000
7/9/2011	1:43:12 PM	PHl3 MFC set to  0.000000
7/9/2011	1:43:12 PM	SiCl4 MFC set to  0.000000
7/9/2011	1:43:12 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	1:43:12 PM	Tube furnace set to 0
7/9/2011	1:43:14 PM	Run finished at 1:43 PM
7/9/2011	1:43:41 PM	Bypass valve opened
7/9/2011	1:44:40 PM	Bypass valve closed
7/9/2011	1:44:40 PM	Main Vac valve opened
7/9/2011	2:46:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2011	2:46:44 PM	Recipe started at 2:46 PM
7/9/2011	2:46:44 PM	H2 valve closed
7/9/2011	2:46:44 PM	BCl3 valve closed
7/9/2011	2:46:44 PM	PH3 valve closed
7/9/2011	2:46:44 PM	SiCl4 pre valve closed
7/9/2011	2:46:44 PM	SiCl4 post valve closed
7/9/2011	2:46:44 PM	Main Vac valve closed
7/9/2011	2:46:44 PM	Bypass valve closed
7/9/2011	2:46:44 PM	Bubbler valve closed
7/9/2011	2:46:44 PM	Helium valve opened
7/9/2011	2:46:44 PM	Helium MFC set to  500.000000
7/9/2011	2:46:44 PM	H2 MFC set to  0.000000
7/9/2011	2:46:44 PM	BCl3 MFC set to  0.000000
7/9/2011	2:46:44 PM	PHl3 MFC set to  0.000000
7/9/2011	2:46:44 PM	SiCl4 MFC set to  0.000000
7/9/2011	2:46:44 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	2:46:44 PM	Tube furnace set to 0
7/9/2011	2:47:50 PM	Helium valve closed
7/9/2011	2:47:50 PM	H2 valve closed
7/9/2011	2:47:50 PM	BCl3 valve closed
7/9/2011	2:47:50 PM	PH3 valve closed
7/9/2011	2:47:50 PM	SiCl4 pre valve closed
7/9/2011	2:47:50 PM	SiCl4 post valve closed
7/9/2011	2:47:50 PM	Main Vac valve closed
7/9/2011	2:47:50 PM	Bypass valve closed
7/9/2011	2:47:50 PM	Bubbler valve closed
7/9/2011	2:47:50 PM	Helium MFC set to  0.000000
7/9/2011	2:47:50 PM	H2 MFC set to  0.000000
7/9/2011	2:47:50 PM	BCl3 MFC set to  0.000000
7/9/2011	2:47:50 PM	PHl3 MFC set to  0.000000
7/9/2011	2:47:50 PM	SiCl4 MFC set to  0.000000
7/9/2011	2:47:50 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	2:47:51 PM	Tube furnace set to 0
7/9/2011	2:47:52 PM	Run finished at 2:47 PM
7/9/2011	2:47:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/9/2011	2:51:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2011	2:51:07 PM	Recipe started at 2:51 PM
7/9/2011	2:51:07 PM	Helium valve closed
7/9/2011	2:51:07 PM	H2 valve closed
7/9/2011	2:51:07 PM	BCl3 valve closed
7/9/2011	2:51:07 PM	PH3 valve closed
7/9/2011	2:51:07 PM	SiCl4 pre valve closed
7/9/2011	2:51:07 PM	SiCl4 post valve closed
7/9/2011	2:51:07 PM	Main Vac valve closed
7/9/2011	2:51:07 PM	Bubbler valve closed
7/9/2011	2:51:07 PM	Bypass valve opened
7/9/2011	2:51:07 PM	Helium MFC set to  0.000000
7/9/2011	2:51:07 PM	H2 MFC set to  0.000000
7/9/2011	2:51:07 PM	BCl3 MFC set to  0.000000
7/9/2011	2:51:07 PM	PHl3 MFC set to  0.000000
7/9/2011	2:51:07 PM	SiCl4 MFC set to  0.000000
7/9/2011	2:51:07 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	2:51:07 PM	Tube furnace set to 0
7/9/2011	2:52:29 PM	Helium valve closed
7/9/2011	2:52:29 PM	H2 valve closed
7/9/2011	2:52:29 PM	BCl3 valve closed
7/9/2011	2:52:29 PM	PH3 valve closed
7/9/2011	2:52:29 PM	SiCl4 pre valve closed
7/9/2011	2:52:29 PM	SiCl4 post valve closed
7/9/2011	2:52:29 PM	Main Vac valve closed
7/9/2011	2:52:29 PM	Bubbler valve closed
7/9/2011	2:52:29 PM	Bypass valve opened
7/9/2011	2:52:29 PM	Helium MFC set to  0.000000
7/9/2011	2:52:29 PM	H2 MFC set to  0.000000
7/9/2011	2:52:29 PM	BCl3 MFC set to  0.000000
7/9/2011	2:52:29 PM	PHl3 MFC set to  0.000000
7/9/2011	2:52:29 PM	SiCl4 MFC set to  0.000000
7/9/2011	2:52:29 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	2:52:29 PM	Tube furnace set to 0
7/9/2011	2:52:56 PM	Helium valve closed
7/9/2011	2:52:56 PM	H2 valve closed
7/9/2011	2:52:56 PM	BCl3 valve closed
7/9/2011	2:52:56 PM	PH3 valve closed
7/9/2011	2:52:56 PM	SiCl4 pre valve closed
7/9/2011	2:52:56 PM	SiCl4 post valve closed
7/9/2011	2:52:56 PM	Bypass valve closed
7/9/2011	2:52:56 PM	Bubbler valve closed
7/9/2011	2:52:56 PM	Main Vac valve opened
7/9/2011	2:52:56 PM	Helium MFC set to  0.000000
7/9/2011	2:52:56 PM	H2 MFC set to  0.000000
7/9/2011	2:52:56 PM	BCl3 MFC set to  0.000000
7/9/2011	2:52:56 PM	PHl3 MFC set to  0.000000
7/9/2011	2:52:56 PM	SiCl4 MFC set to  0.000000
7/9/2011	2:52:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2011	2:52:56 PM	Tube furnace set to 0
7/9/2011	2:52:57 PM	Run finished at 2:52 PM
7/9/2011	2:52:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
